Main features:
主要特點(diǎn)
1) Used for big size graphene film growing with double tubes inside& outside, also for CVD experiment with RTP requirement
雙層石英管,專為生長大尺寸薄膜石墨烯研制的,也應(yīng)用于有快速升溫需要的CVD實(shí)驗(yàn)。
2) With two-way slide, shuffle the furnace to pull out the sample to achieve rapid cooling after growing.
安裝雙向?qū)е?,左右拉?dòng)爐體能保證讓樣品達(dá)到快速的升降溫
Technical Parameters
技術(shù)參數(shù)
Power 輸入電源 | · Power rated: 7KW (208-240V) · 額定功率:7KW (208-240V) |
Voltage 電壓 | · Voltage rated: AC208-240V 50/60HZ · 額定電壓: AC208-240V 50/60HZ |
Working Temperature 工作溫度 | · Max. Temperature: 1200 °C ( 1 hr) Z高溫度:1200℃ (1小時(shí)) · Continuous working temperature: ≤1100℃ 持續(xù)工作溫度:≤1100℃ · Max. Heating/cooling Rate: ≤20°C /S Z大升/降溫速率:≤20℃/秒 |
控溫方式 | · PID automatic control and auto-tune function. 模糊PID控制和自整定調(diào)節(jié) · 30 programmable segments for precise thermal processing. 智能化30段可編程控制 · Built-in protection for the over-heated and broken thermocouple. 超溫和斷偶報(bào)警功能 |
Length of heating zone 加熱區(qū)長度 | · 300+300+300mm |
Length of constant zone 恒溫區(qū)長度 | · 150+200+150mm |
Movable Range 可移動(dòng)范圍 | · 1200mm |
Heating Elements 加熱元件 | · Resistance wire, Fe-Cr-Al Alloy doped by Mo · 電阻絲(摻鉬鐵鉻鋁合金) |
Temperature Accuracy 控溫精度 | +/- 1 °C |
· size: Φ50/80/100/130*1800mm(optional) · 尺寸:Φ50/80/100/130*1800mm(管徑可選) · Two tube blocks are included for blocking heat radiation generated from tube center,must be fully inserted into the furnace chamber before heating in the correct position(quartz and ceramic optional). · 兩個(gè)氧化鋁管堵阻擋管中心產(chǎn)生的熱輻射,管堵必須在加熱前塞進(jìn)爐膛的正確位置(石英和氧化鋁管堵可選) | |
Dimensions 尺寸 | · Furnace size : 2000*490*760mm(L*W*H without tube & flange) · 爐子尺寸:2000*490*760mm(長*寬*高 不含爐管和法蘭) |
Net Weight 凈重 | 190kg |
真空法蘭 | · KF25 quick clamp flange 兩端為KF25快速卡箍法蘭 |
Vacuum Pressure 真空壓力 | · 133torr can be achieved by mechanical pump 機(jī)械泵可達(dá)133torr(1pa) · 10^-6 torr can be reached by molecular pump 分子泵可達(dá)10^-6torr(10^-3pa) · Please click the picture below to order vacuum parts 點(diǎn)擊下列圖片訂購真空部件
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Warranty 質(zhì)保 | One year limited warranty with lifetime support (Such consumable parts as tube, quartz block, and O-rings, etc. are NOT supported by the warranty) 一年質(zhì)保終身支持(消耗品如爐管,石英管堵,O型圈等不在質(zhì)保范圍內(nèi)) |
Warning 注意事項(xiàng) | · Small cracks may appear on the surface of the refractory ceramics over extended use. This is a normal occurrence and the cracks may be repaired with alumina coating. · 在使用過程中爐膛表面可能出現(xiàn)細(xì)小裂紋。這是正常情況,裂紋可以用氧化鋁涂層修復(fù)。 |
Compliance 認(rèn)證 | · CE Certified CE認(rèn)證 · The furnace is ready to pass TUV (UL61010) or CSA certification at extra cost. 可付費(fèi)進(jìn)行TUV(UL61010)或CSA認(rèn)證 |
Operation instructions 操作指導(dǎo) | · Click to download the operating manual · 點(diǎn)擊下載說明書 |